JPH0530122Y2 - - Google Patents

Info

Publication number
JPH0530122Y2
JPH0530122Y2 JP1987132204U JP13220487U JPH0530122Y2 JP H0530122 Y2 JPH0530122 Y2 JP H0530122Y2 JP 1987132204 U JP1987132204 U JP 1987132204U JP 13220487 U JP13220487 U JP 13220487U JP H0530122 Y2 JPH0530122 Y2 JP H0530122Y2
Authority
JP
Japan
Prior art keywords
pressure
sensing element
pressure sensing
ceramic
ceramic pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987132204U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6437636U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987132204U priority Critical patent/JPH0530122Y2/ja
Priority to US07/234,571 priority patent/US4916426A/en
Publication of JPS6437636U publication Critical patent/JPS6437636U/ja
Application granted granted Critical
Publication of JPH0530122Y2 publication Critical patent/JPH0530122Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP1987132204U 1987-08-28 1987-08-28 Expired - Lifetime JPH0530122Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987132204U JPH0530122Y2 (en]) 1987-08-28 1987-08-28
US07/234,571 US4916426A (en) 1987-08-28 1988-08-22 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987132204U JPH0530122Y2 (en]) 1987-08-28 1987-08-28

Publications (2)

Publication Number Publication Date
JPS6437636U JPS6437636U (en]) 1989-03-07
JPH0530122Y2 true JPH0530122Y2 (en]) 1993-08-02

Family

ID=15075826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987132204U Expired - Lifetime JPH0530122Y2 (en]) 1987-08-28 1987-08-28

Country Status (2)

Country Link
US (1) US4916426A (en])
JP (1) JPH0530122Y2 (en])

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2549712B2 (ja) * 1988-07-27 1996-10-30 日本碍子株式会社 応力検出器
DE4206592A1 (de) * 1992-03-03 1993-09-09 Nowak Klaus Verfahren und vorrichtung zur leistungsmessung von motoren
US5406852A (en) * 1992-03-18 1995-04-18 Matsushita Electric Industrial Co., Ltd. Pressure sensor having a resistor element on a glass dryer with electrodes connected thereto
US5559280A (en) * 1994-11-14 1996-09-24 Eaton Corporation Combustion chamber pressure transducer and method of making same
DE10004614A1 (de) * 2000-02-03 2001-08-16 Siemens Ag Drucksensor zum Erfassen des Druckes einer Flüssigkeit
JP4085834B2 (ja) * 2003-02-17 2008-05-14 株式会社デンソー 圧力検出装置
JP2005275629A (ja) 2004-03-23 2005-10-06 Nec Corp マルチプロセッサシステム、及び、メモリアクセス方法
ITTO20121130A1 (it) * 2012-12-21 2014-06-22 Metallux Sa Sensore di pressione
US20150096369A1 (en) * 2013-10-04 2015-04-09 Ultra Analytical Group, LLC Apparatus, System and Method for Measuring the Properties of a Corrosive Liquid
US20150096804A1 (en) * 2013-10-04 2015-04-09 Ultra Analytical Group, LLC Apparatus, System and Method for Measuring the Properties of a Corrosive Liquid
EP2894450A1 (en) 2014-01-13 2015-07-15 Danfoss A/S A sensor for measuring fluid variables in a corrosive environment
US11243130B2 (en) * 2016-09-14 2022-02-08 National University Corporation Kobe University Force sensor and force sensor manufacturing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068206A (en) * 1976-06-25 1978-01-10 Midland-Ross Corporation Pressure-sensing semiconductor transducer
JPS54111873A (en) * 1978-02-21 1979-09-01 Nippon Denso Co Ltd Knocking detector for internal combustion engines
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
US4431981A (en) * 1982-09-22 1984-02-14 Chrysler Corporation Pressure unit assembly

Also Published As

Publication number Publication date
JPS6437636U (en]) 1989-03-07
US4916426A (en) 1990-04-10

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